The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 21, 2021
Filed:
Apr. 10, 2020
Kla-tencor Corporation, Milpitas, CA (US);
Eugene Shifrin, Sunnyvale, CA (US);
Bjorn Brauer, Beaverton, OR (US);
Sumit Sen, Sunnyvale, CA (US);
Ashok Mathew, Fremont, CA (US);
Sreeram Chandrasekaran, Santa Clara, CA (US);
Lisheng Gao, Saratoga, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
Defects from a hot scan can be saved, such as on persistent storage, random access memory, or a split database. The persistent storage can be patch-based virtual inspector virtual analyzer (VIVA) or local storage. Repeater defect detection jobs can determined and the wafer can be inspected based on the repeater defect detection jobs. Repeater defects can be analyzed and corresponding defect records to the repeater defects can be read from the persistent storage. These results may be returned to the high level defect detection controller.