The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 2021
Filed:
Mar. 28, 2020
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Jochen Hetzler, Aalen, DE;
Stefan Schulte, Lauchheim, DE;
CARL ZEISS SMT GMBH, Oberkochen, DE;
Abstract
A compensation optical unit () for a measurement system () for determining a shape of an optical surface () of a test object () by interferometry generates a measuring wave (), directed at the test object, with a wavefront that is at least partly adapted to a target shape of the optical surface from an input wave (). The unit includes first () and second () optical elements disposed in a beam path of the input wave. The second optical element is a diffractive optical element configured to split the input wave into the measuring wave and a reference wave () following an interaction with the first optical element. At least 20% of a refractive power of the entire compensation optical unit is allotted to the first optical element, and this allotted refractive power has the same sign as the refractive power of the entire compensation optical unit.