The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 09, 2021

Filed:

Aug. 22, 2019
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Tian Hu, Hsinchu, TW;

Hung-Jui Kuo, Hsinchu, TW;

Yu-Hsiang Hu, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H01L 21/56 (2006.01); H01L 23/31 (2006.01);
U.S. Cl.
CPC ...
H01L 24/09 (2013.01); H01L 21/565 (2013.01); H01L 23/3107 (2013.01); H01L 24/03 (2013.01); H01L 24/06 (2013.01); H01L 2224/02331 (2013.01); H01L 2224/02333 (2013.01); H01L 2224/02372 (2013.01); H01L 2224/02379 (2013.01); H01L 2224/0401 (2013.01);
Abstract

A package includes a first redistribution structure, a die, a plurality of conductive structures, an encapsulant, and a second redistribution structure. The first redistribution structure includes a composite dielectric layer, a plurality of under bump metallization patterns, a dielectric layer, and a plurality of conductive patterns. The composite dielectric layer includes a first sub-layer and a second sub-layer stacked on the first sub-layer. The under bump metallization patterns are over the first sub-layer and penetrate through the composite dielectric layer. The dielectric layer is disposed on the second sub-layer of the composite dielectric layer. The conductive patterns are embedded in the dielectric layer. The die and the conductive structures are on the first redistribution structure. The encapsulant encapsulates the die and the conductive structures. The second redistribution structure is over the conductive structures, the encapsulant, and the die.


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