The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 2021
Filed:
May. 02, 2018
Asml Holding N.v., Veldhoven, NL;
Gerrit Johannes Nijmeijer, Stamford, CT (US);
Junqiang Zhou, Wilton, CT (US);
Piotr Jan Meyer, Auburndale, MA (US);
Jeffrey John Lombardo, Roxbury, CT (US);
Igor Matheus Petronella Aarts, Port Chester, NY (US);
ASML Holding N.V., Veldhoven, NL;
Abstract
An alignment mark for determining a two-dimensional alignment position of a substrate is discussed. The alignment mark includes an array of patterns. The array of patterns includes a first set of patterns and a second set of patterns arranged. The first set of patterns is arranged in a first sequence along a first direction. The second set of patterns is arranged in a second sequence along the first direction. The second sequence is different from the first sequence. Each pattern of the array of patterns is different from other patterns of the array of patterns that are adjacent to the each pattern.