The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2021
Filed:
Nov. 12, 2019
International Business Machines Corporation, Armonk, NY (US);
Ruqiang Bao, Wappingers Falls, NY (US);
Kisup Chung, Albany, NY (US);
Andrew M. Greene, Albany, NY (US);
Sivananda K. Kanakasabapathy, Niskayuna, NY (US);
David L. Rath, Stormville, NY (US);
Indira P. V. Seshadri, Troy, NY (US);
Rajasekhar Venigalla, Hopewell Junction, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
An additive core subtractive liner method is described for forming electrically conductive contacts. The method can include forming a first trench in a first dielectric layer to expose a first portion of a metal liner, and filling said first trench with a second dielectric layer. A metal cut trench is formed in the second dielectric layer. A portion of the metal liner exposed by the metal cut trench is removed with a subtractive method. The method continues with filling the metal cut trench with a dielectric fill, and replacing the remaining portions of the second dielectric layer with an additive core conductor to provide contacts to remaining portions of the metal liner.