The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2021
Filed:
Oct. 16, 2019
Nuflare Technology, Inc., Yokohama, JP;
Takafumi Inoue, Chigasaki, JP;
Kazuhiro Nakashima, Kawasaki, JP;
Manabu Isobe, Hiratsuka, JP;
Hiroteru Akiyama, Yokohama, JP;
NuFlare Technology, Inc., Yokohama, JP;
Abstract
A pattern inspection apparatus includes an optical image acquisition mechanism to acquire optical image data of a plurality of regions from a substrate where a plurality of figure patterns are formed, a plurality of comparison circuits each of which performs one of die-to-die inspection processing for comparing the optical image data with each other and die-to-database inspection processing for comparing the optical image data with reference image data generated from design pattern data, and an inspection circuit to individually output, for each region of the plurality of regions, the optical image data of a region concerned to comparison circuits, whose number is variably set for each region, in the plurality of comparison circuits, and to control each comparison circuit, serving as an output destination of the optical image data in the plurality of comparison circuits, to perform one of the die-to-die inspection processing and the die-to-database inspection processing.