The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2021
Filed:
Aug. 09, 2019
Versum Materials Us, Llc, Tempe, AZ (US);
Daniel P. Spence, Carlsbad, CA (US);
Xinjian Lei, Vista, CA (US);
Ronald Martin Pearlstein, San Marcos, CA (US);
Manchao Xiao, San Diego, CA (US);
Jianheng Li, Santa Clara, CA (US);
Versum Materials US, LLC, Tempe, AZ (US);
Abstract
Bisaminoalkoxysilanes of Formula I, and methods using same, are described herein:RSi(NRR)(NRR)OR  Iwhere Ris selected from hydrogen, a Cto Clinear alkyl group, a Cto Cbranched alkyl group, a Cto Ccyclic alkyl group, a Cto Calkenyl group, a Cto Calkynyl group, a Cto Caromatic hydrocarbon group; R, R, R, and Rare each independently selected from hydrogen, a Cto Cbranched alkyl group, a Cto Ccyclic alkyl group, a Cto Calkenyl group, a Cto Calkynyl group, and a Cto Caromatic hydrocarbon group; Ris selected from a Cto Clinear alkyl group, a Cto Cbranched alkyl group, a Cto Ccyclic alkyl group, a Cto Calkenyl group, a Cto Calkynyl group, and a Cto Caromatic hydrocarbon group.