The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 21, 2021

Filed:

Apr. 30, 2019
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Marc Adam Bergendahl, Troy, NY (US);

Gauri Karve, Cohoes, NY (US);

Fee Li Lie, Albany, NY (US);

Eric R. Miller, Watervliet, NY (US);

Robert Russell Robison, Rexford, NY (US);

John Ryan Sporre, Albany, NY (US);

Sean Teehan, Rensselaer, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 29/06 (2006.01); H01L 29/423 (2006.01); H01L 29/66 (2006.01); H01L 29/786 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0657 (2013.01); H01L 29/42392 (2013.01); H01L 29/66742 (2013.01); H01L 29/78642 (2013.01); H01L 29/78648 (2013.01); H01L 29/78696 (2013.01);
Abstract

A semiconductor device includes a fin structure having a circular cylindrical shape, and including a first recess formed on a first side of the fin structure and a second recess formed on a second side of the fin structure opposite the first side, an inner gate formed inside the fin structure, and an inner gate insulating layer formed between the inner gate and an inner surface of the fin structure.


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