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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11075269 B1

PDFFull Text
Date of Patent:
Jul. 27, 2021

Filed:

Oct. 08, 2019

Semiconductor device and manufacturing method thereof

Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Cheng-Yi Peng, Taipei, TW;

Ting Tsai, Hsinchu, TW;

Chung-Wei Hung, Tainan, TW;

Jung-Ting Chen, Zhubei, TW;

Ying-Hua Lai, Taipei, TW;

Song-Bor Lee, Zhubei, TW;

Bor-Zen Tien, Hsinchu, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;

Attorney:

McDermott Will & Emery LLP

Primary Examiner:

Julio J Maldonado

Assistant Examiner:

Mohammad A Rahman

Int. Cl.
CPC ...
H01L 29/08 (2006.01); H01L 29/24 (2006.01); H01L 29/78 (2006.01); H01L 21/02 (2006.01); H01L 21/265 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0847 (2013.01); H01L 29/24 (2013.01); H01L 21/0262 (2013.01); H01L 21/02521 (2013.01); H01L 21/02529 (2013.01); H01L 21/26513 (2013.01); H01L 29/785 (2013.01); H01L 29/7848 (2013.01);
Abstract

A semiconductor device, includes a channel region, and a source/drain region adjacent to the channel region. The source/drain region includes a first epitaxial layer, a second epitaxial layer epitaxially formed on the first epitaxial layer and a third epitaxial layer epitaxially formed on the second epitaxial layer, and the first epitaxial layer is made of SiAs.

Find Patent Forward Citations

Peng, Cheng-Yi. (2021). Semiconductor device and manufacturing method thereof (U.S. Patent No. 11075269). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11075269

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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