The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 13, 2021

Filed:

Nov. 18, 2019
Applicants:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

National Taiwan University, Taipei, TW;

Inventors:

Fang-Liang Lu, New Taipei, TW;

I-Hsieh Wong, Kaohsiung, TW;

Shih-Ya Lin, Chaozhou Township, TW;

Cheewee Liu, Taipei, TW;

Samuel C. Pan, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/10 (2006.01); H01L 21/02 (2006.01); H01L 29/08 (2006.01); H01L 29/161 (2006.01); H01L 29/165 (2006.01); H01L 29/06 (2006.01); H01L 21/28 (2006.01); H01L 29/66 (2006.01); H01L 21/268 (2006.01); H01L 21/324 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7848 (2013.01); H01L 21/0245 (2013.01); H01L 21/02381 (2013.01); H01L 21/02532 (2013.01); H01L 21/02535 (2013.01); H01L 21/02664 (2013.01); H01L 21/268 (2013.01); H01L 21/28255 (2013.01); H01L 21/324 (2013.01); H01L 29/0847 (2013.01); H01L 29/1033 (2013.01); H01L 29/1054 (2013.01); H01L 29/161 (2013.01); H01L 29/165 (2013.01); H01L 29/665 (2013.01); H01L 29/66651 (2013.01); H01L 21/02576 (2013.01); H01L 21/02579 (2013.01); H01L 29/0649 (2013.01);
Abstract

A semiconductor device includes a first layer of a first semiconductor material disposed on a semiconductor substrate and a second layer of a second semiconductor material disposed on the first layer. The second semiconductor material is formed of an alloy that includes a first element and a second element. The first semiconductor material and the second semiconductor material are different. A gate structure is disposed on a first portion of the second layer. A surface region of a second portion of the second layer not covered by the gate structure has a higher concentration of the second element than an internal region of the second portion of the second layer, and the surface region surrounds the internal region.


Find Patent Forward Citations

Loading…