The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 13, 2021
Filed:
Aug. 09, 2018
Tokyo Electron Limited, Tokyo, JP;
Yoshiki Okamoto, Koshi, JP;
Yasushi Takiguchi, Koshi, JP;
Akihiro Kubo, Koshi, JP;
Hayato Hosaka, Koshi, JP;
Ryuto Ozasa, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A dressing apparatusincludes a bus memberwhich is equipped with a ceiling plateand a circular or polygonal cylindrical skirt portionprovided at a bottom surface of the ceiling plateand which is configured to accommodate a polishing padfrom thereabove. The bus memberincludes a dual fluid nozzleconfigured to jet a cleaning liquid and a gas onto a polishing surface of the polishing pad; a dress boardconfigured to come into contact with the polishing surface of the polishing pad; and a rinse nozzleconfigured to supply a rinse liquid onto a contact surface between the polishing surface of the polishing padand the dress board. A cleaning liquid, a fragment of a grindstone or a sludge is suppressed from being scattered around by the skirt portion