The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2021
Filed:
Apr. 06, 2020
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Siddarth Krishnan, Newark, CA (US);
Rajesh Sathiyanarayanan, Bangalore, IN;
Atashi Basu, Menlo Park, CA (US);
Paul F. Ma, Scottsdale, AZ (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/28 (2006.01); H01L 21/321 (2006.01); H01L 29/51 (2006.01); H01L 21/285 (2006.01); H01L 29/40 (2006.01); H01L 29/49 (2006.01); H01L 21/02 (2006.01); H01L 29/423 (2006.01);
U.S. Cl.
CPC ...
H01L 21/28088 (2013.01); H01L 21/28556 (2013.01); H01L 21/321 (2013.01); H01L 29/401 (2013.01); H01L 29/4966 (2013.01); H01L 29/513 (2013.01); H01L 29/517 (2013.01); H01L 21/0228 (2013.01); H01L 21/02181 (2013.01); H01L 21/02205 (2013.01); H01L 21/02271 (2013.01); H01L 29/42364 (2013.01);
Abstract
Methods of modifying the threshold voltage of metal oxide stacks are discussed. These methods utilize materials which provide larger shifts in threshold voltage while also being annealed at lower temperatures.