The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 2021
Filed:
Dec. 02, 2016
Asml Netherlands B.v., Veldhoven, NL;
Derk Servatius Gertruda Brouns, Herentals, BE;
Paul Janssen, Eindhoven, NL;
Mohammad Reza Kamali, Eindhoven, NL;
Mária Péter, Eindhoven, NL;
Willem Joan Van Der Zande, Bussum, NL;
Pieter-Jan Van Zwol, Eindhoven, NL;
David Ferdinand Vles, Eindhoven, NL;
Willem-Pieter Voorthuijzen, 's-Hertogenbosch, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A membrane assembly for EUV lithography, the membrane assembly including: a planar membrane; a border configured to hold the membrane; and a frame assembly connected to the border and configured to attach to a patterning device for EUV lithography, wherein the frame assembly is connected to the border in a direction perpendicular to the plane of the membrane such that in use the frame assembly is between the border and the patterning device.