The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2021
Filed:
Aug. 28, 2017
Asml Netherlands B.v., Veldhoven, NL;
Pepijn Van Den Eijnden, Eindhoven, NL;
Cornelius Maria Rops, Waalre, NL;
Theodorus Wilhelmus Polet, Geldrop, NL;
Floor Lodewijk Keukens, Turnhout, BE;
Gheorghe Tanasa, Eindhoven, NL;
Rogier Hendrikus Magdalena Cortie, Weert, NL;
Koen Cuypers, Lommel, BE;
Harold Sebastiaan Buddenberg, Sittard, NL;
Giovanni Luca Gattobigio, Eindhoven, NL;
Evert Van Vliet, Eindhoven, NL;
Nicolaas Ten Kate, Almkerk, NL;
Mark Johannes Hermanus Frencken, Ittervoort, NL;
Jantien Laura Van Erve, Eindhoven, NL;
Marcel Maria Cornelius Franciscus Teunissen, Grathem, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A fluid handling structure for a lithographic apparatus, the structure having: an aperture for the passage therethrough of a beam; a first part; and a second part, wherein the first and/or second part define a surface for the extraction of immersion fluid, relative movement between the first and second parts is effective to change a position of fluid flow into or out of the surface relative to the aperture, and the first or second part has at least one through-hole for the fluid flow and the other of the first or second part has at least one opening for the fluid flow, the at least one through-hole and at least one opening being in fluid communication when aligned, the relative movement allowing alignment of the at least one opening with different ones of the through-hole to change the position of the fluid flow into or out of the surface.