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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11027310 B1

PDFFull Text
Date of Patent:
Jun. 08, 2021

Filed:

Nov. 18, 2016

Fluid deposition apparatus and method

Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Inventors:

Chun-Wen Cheng, Zhubei, TW;

Jung-Huei Peng, Jhubei, TW;

Yi-Shao Liu, Zhubei, TW;

Fei-Lung Lai, New Taipei, TW;

Shang-Ying Tsai, Pingzhen, TW;

Assignee:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Attorney:

Eschweiler & Potashnik, LLC

Primary Examiner:

Jesse Y Miyoshi

Int. Cl.
CPC ...
H01L 21/66 (2006.01); B05C 11/10 (2006.01); G01R 31/28 (2006.01); G01R 1/067 (2006.01); G01N 27/414 (2006.01); B01J 19/00 (2006.01); B05D 1/18 (2006.01); B05D 5/04 (2006.01);
U.S. Cl.
CPC ...
B05C 11/1039 (2013.01); B01J 19/0046 (2013.01); B05D 1/18 (2013.01); B05D 5/04 (2013.01); G01N 27/4145 (2013.01); G01R 1/06783 (2013.01); G01R 31/2886 (2013.01); G01R 31/2887 (2013.01); G01R 31/2889 (2013.01); B01J 2219/0043 (2013.01); B01J 2219/00286 (2013.01); B01J 2219/00353 (2013.01); B01J 2219/00387 (2013.01); B01J 2219/00418 (2013.01); B01J 2219/00596 (2013.01); B01J 2219/00605 (2013.01); B01J 2219/00623 (2013.01); B01J 2219/00659 (2013.01); B01J 2219/00698 (2013.01);
Abstract

The present disclosure relates to a method of depositing a fluid onto a substrate. In some embodiments, the method may be performed by mounting a substrate to a micro-fluidic probe card, so that the substrate abuts a cavity within the micro-fluidic probe card that is in communication with a fluid inlet and a fluid outlet. A first fluidic chemical is selectively introduced into the cavity via the fluid inlet of the micro-fluidic probe card.

Find Patent Forward Citations

Cheng, Chun-Wen. (2021). Fluid deposition apparatus and method (U.S. Patent No. 11027310). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11027310

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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