The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 06, 2021

Filed:

Sep. 17, 2019
Applicant:

Taiwan Semiconductor Manufacturing Company Limited, Hsin-Chu, TW;

Inventors:

Yan-Han Chen, Miaoli County, TW;

Cheng-Kang Hu, Kaohsiung, TW;

Ren-Hau Wu, New Taipei, TW;

Cheng-Hung Chen, Zhubei, TW;

Feng-Kuang Wu, Hsinchu County, TW;

Hsu-Shui Liu, Pingjhen, TW;

Jiun-Rong Pai, Jhubei, TW;

Shou-Wen Kuo, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 7/10 (2006.01); H01L 21/67 (2006.01); G06T 7/00 (2017.01); H01L 21/677 (2006.01); G06K 7/14 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67265 (2013.01); G06T 7/0004 (2013.01); H01L 21/6773 (2013.01); H01L 21/67775 (2013.01); G06K 7/1417 (2013.01);
Abstract

A method for positioning a mobile device relative to a stationary device in a semiconductor manufacturing environment is disclosed. The method includes detecting a target affixed to the stationary device at a target location, wherein the target location corresponds to a location of the target relative to a reference point on the stationary device, determining a first position coordinate offset value based upon detecting the target, and moving the mobile device, using the first position coordinate offset value, relative to train the mobile device to move relative to the stationary device for the stationary device to performing a semiconductor manufacturing operation.


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