The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2021
Filed:
Jul. 03, 2018
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/20 (2006.01); G03F 7/20 (2006.01); G01N 21/956 (2006.01); G03F 1/84 (2012.01);
U.S. Cl.
CPC ...
G02B 5/208 (2013.01); G01N 21/956 (2013.01); G02B 5/205 (2013.01); G03F 1/84 (2013.01); G03F 7/70625 (2013.01);
Abstract
An EUV greyscale filter of an EUV optical unit of a metrology system has a membrane that is at least partly transmissive in regions for EUV light in the wavelength range of between 5 nm and 30 nm. The latter interacts with a whole beam of the EUV light in the operational position of the EUV greyscale filter. This results in a metrology system with extended application possibilities on account of the EUV greyscale filter.