The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 23, 2021

Filed:

Feb. 12, 2019
Applicant:

Macronix International Co., Ltd., Hsinchu, TW;

Inventors:

Chih-Wei Hu, Toufen, TW;

Teng-Hao Yeh, Hsinchu, TW;

Yu-Wei Jiang, Hsinchu, TW;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/11582 (2017.01); H01L 27/11565 (2017.01); H01L 29/792 (2006.01); H01L 23/528 (2006.01); H01L 21/768 (2006.01); H01L 21/311 (2006.01); H01L 23/522 (2006.01); H01L 21/28 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); H01L 21/31111 (2013.01); H01L 21/76829 (2013.01); H01L 21/76897 (2013.01); H01L 23/5226 (2013.01); H01L 23/5283 (2013.01); H01L 27/11565 (2013.01); H01L 29/40117 (2019.08); H01L 29/7926 (2013.01);
Abstract

A three-dimensional memory device includes a substrate, conductive layers and insulating layers, a storage layer, a first channel, a second channel and a first conductive plug. The conductive layers and insulating layers are alternately stacked over the substrate to form a multi-layer stacked structure. The storage layer penetrates through the multi-layer stacked structure, and has a first string portion and a second string portion that are spaced from each other. The first channel is located on a lateral side of the first string portion. The second channel is located on a lateral side of the second string portion. The first channel and the second channel have an upper channel portion and a lower channel portion. The first conductive plug is interconnected between the upper channel portion and the lower channel portion.


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