The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2021
Filed:
Jul. 01, 2016
Applicant:
Essai, Inc., Fremont, CA (US);
Inventors:
Nasser Barabi, Lafayette, CA (US);
Chee Wah Ho, Fremont, CA (US);
Joven R Tienzo, Fremont, CA (US);
Oksana Kryachek, San Francisco, CA (US);
Elena V. Nazarov, San Mateo, CA (US);
Assignee:
ESSAI, INC., Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 17/00 (2006.01); G01R 31/28 (2006.01); G01R 1/04 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2874 (2013.01); F16K 17/003 (2013.01); G01R 1/0458 (2013.01); G01R 31/2875 (2013.01); G01R 31/2891 (2013.01);
Abstract
The present invention relates to systems and methods for preventing over pressurization in a fluid management system used in an integrated circuit (IC) device tester. The prevention of the over pressurization in the fluid management system is based on the use of a pressure relief valve coupled to the fluid management system.