The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2020
Filed:
Jul. 19, 2017
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Raymond Wilhelmus Louis Lafarre, Helmond, NL;
Sjoerd Nicolaas Lambertus Donders, Vught, NL;
Nicolaas Ten Kate, Almkerk, NL;
Nina Vladimirovna Dziomkina, Eindhoven, NL;
Yogesh Pramod Karade, Eindhoven, NL;
Elisabeth Corinne Rodenburg, Heeze, NC (US);
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/58 (2006.01); B22F 7/06 (2006.01); B23K 26/354 (2014.01); B23K 26/342 (2014.01); G03F 7/20 (2006.01); B23Q 3/18 (2006.01); B05D 3/06 (2006.01); B05D 5/00 (2006.01); B33Y 10/00 (2015.01); B33Y 80/00 (2015.01); B22F 3/105 (2006.01);
U.S. Cl.
CPC ...
B22F 7/062 (2013.01); B05D 3/06 (2013.01); B05D 5/00 (2013.01); B22F 3/1055 (2013.01); B23K 26/342 (2015.10); B23K 26/354 (2015.10); B23Q 3/18 (2013.01); B33Y 10/00 (2014.12); B33Y 80/00 (2014.12); G03F 7/20 (2013.01); G03F 7/707 (2013.01); G03F 7/708 (2013.01); G03F 7/70341 (2013.01); G03F 7/70416 (2013.01); G03F 7/70708 (2013.01); G03F 7/70716 (2013.01); G03F 7/70733 (2013.01);
Abstract
An object holder for a lithographic apparatus has a main body having a surface. A plurality of burls to support an object is formed on the surface or in apertures of a thin-film stack. At least one of the burls is formed by laser-sintering. At least one of the burls formed by laser-sintering may be a repair of a damaged burl previously formed by laser-sintering or another method.