The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 15, 2020

Filed:

Jun. 15, 2018
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Yi-Hsiu Chen, Hsinchu, TW;

Tsang-Jiuh Wu, Hsinchu, TW;

Wen-Chih Chiou, Miaoli County, TW;

Tung-Hsien Wu, Changhua County, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H01L 25/065 (2006.01);
U.S. Cl.
CPC ...
H01L 24/05 (2013.01); H01L 24/03 (2013.01); H01L 24/08 (2013.01); H01L 25/0657 (2013.01); H01L 24/89 (2013.01); H01L 2224/0311 (2013.01); H01L 2224/0345 (2013.01); H01L 2224/03616 (2013.01); H01L 2224/03827 (2013.01); H01L 2224/03845 (2013.01); H01L 2224/05015 (2013.01); H01L 2224/05017 (2013.01); H01L 2224/05083 (2013.01); H01L 2224/05555 (2013.01); H01L 2224/05557 (2013.01); H01L 2224/05573 (2013.01); H01L 2224/08145 (2013.01); H01L 2224/80895 (2013.01); H01L 2224/80896 (2013.01); H01L 2225/06565 (2013.01);
Abstract

Provided is a die structure including a die, a bonding structure, and a protection structure. The die includes a substrate and a metal feature disposed over the substrate. The bonding structure is disposed over the die. The bonding structure includes a bonding dielectric layer and a bonding metal layer disposed in the bonding dielectric layer. The bonding metal layer is electrically connected to the metal feature of the die. The protection structure is disposed between a top portion of the bonding metal layer and a top portion of the bonding dielectric layer. A die stack structure and a method of fabricating the die structure are also provided.


Find Patent Forward Citations

Loading…