The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2020
Filed:
May. 02, 2019
Asml Netherlands B.v., AH Veldhoven, NL;
Peter Paul Hempenius, Nuenen, NL;
Sven Antoin Johan Hol, San Jose, CA (US);
Maarten Frans Janus Kremers, Eindhoven, NL;
Henricus Martinus Johannes Van De Groes, Tiel, NL;
Niels Johannes Maria Bosch, Venlo, NL;
Marcel Koenraad Marie Baggen, Nuenen, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An e-beam apparatus is disclosed, the tool comprising an electron optics system configured to project an e-beam onto an object, an object table to hold the object, and a positioning device configured to move the object table relative to the electron optics system. The positioning device comprises a short stroke stage configured to move the object table relative to the electron optics system and a long stroke stage configured to move the short stroke stage relative to the electron optics system. The e-beam apparatus further comprises a magnetic shield to shield the electron optics system from a magnetic disturbance generated by the positioning device. The magnetic shield may be arranged between the positioning device and the electron optics system.