The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2020
Filed:
Jul. 01, 2019
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Thomas Wolfsteiner, Aalen, DE;
Stefan Krone, Aalen, DE;
Volker Wieczorek, Neu-Ulm, DE;
Lars Berger, Aalen-Unterkochen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02B 17/06 (2006.01); G02B 26/08 (2006.01); H05K 1/02 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70891 (2013.01); G02B 17/0631 (2013.01); G02B 26/0833 (2013.01); G03F 7/7015 (2013.01); G03F 7/70808 (2013.01); G03F 7/70825 (2013.01); G03F 7/70833 (2013.01); G03F 7/70841 (2013.01); G03F 7/70883 (2013.01); H05K 1/0201 (2013.01);
Abstract
A component for a projection exposure apparatus includes a printed circuit board arranged in an encapsulated housing and having electronic component parts, and a heat conducting structure for dissipating heat from the electronic component parts to an outer side of the housing.