The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2020
Filed:
Jun. 01, 2017
Applicant:
Pdf Solutions, Inc., San Jose, CA (US);
Inventors:
Sharad Saxena, Richardson, TX (US);
Tomasz Brozek, Morgan Hill, CA (US);
Yuan Yu, San Jose, CA (US);
Mike Kyu Hyon Pak, San Jose, CA (US);
Meindert Martin Lunenborg, St Gely du Fesc, FR;
Assignee:
PDF Solutions, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 7/06 (2006.01); G01R 27/26 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01R 27/2605 (2013.01); G01B 7/08 (2013.01); H01L 22/14 (2013.01); H01L 22/34 (2013.01); G01B 2210/56 (2013.01);
Abstract
Described are test structures and methods for measuring silicon thickness in fully depleted silicon-on-insulator technologies.