The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2020
Filed:
Sep. 07, 2018
Applicant:
Globalfoundries Inc., Grand Cayman, KY;
Inventors:
Hsueh-Chung Chen, Cohoes, NY (US);
Ravi P. Srivastava, Clifton Park, NY (US);
Somnath Ghosh, Clifton Park, NY (US);
Nicholas V. Licausi, Watervliet, NY (US);
Terry A. Spooner, Mechanicville, NY (US);
Sean Reidy, Clifton Park, NY (US);
Assignee:
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Primary Examiner:
Int. Cl.
CPC ...
B32B 3/00 (2006.01); H01L 21/033 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0332 (2013.01); H01L 21/0337 (2013.01); Y10T 428/24917 (2015.01);
Abstract
The present disclosure relates to a structure which includes a first metal layer patterned as a mandrel, a dielectric spacer on the first metal layer, and a second metal layer on the dielectric spacer.