logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10818493 B1

PDFFull Text
Expired
Date of Patent:
Oct. 27, 2020

Filed:

Dec. 13, 2018

Silicon-based hardmask

Applicant:

Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);

Inventors:

Suzanne M. Coley, Mansfield, MA (US);

Paul J. LaBeaume, Auburn, MA (US);

Shintaro Yamada, Shrewsbury, MA (US);

Cecilia W. Kiarie, Shrewsbury, MA (US);

Li Cui, Westborough, MA (US);

Bhooshan Popere, Marlborough, MA (US);

Assignee:

Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);

Attorney:

Jonathan D. Baskin

Primary Examiner:

Mohammad M Choudhry

Int. Cl.
CPC ...
H01L 21/027 (2006.01); C08G 77/04 (2006.01); G03F 7/09 (2006.01); C09D 7/20 (2018.01); C08G 77/50 (2006.01); C09D 183/14 (2006.01); G03F 7/075 (2006.01); C09D 5/00 (2006.01); C08G 77/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0276 (2013.01); C08G 77/04 (2013.01); C08G 77/50 (2013.01); C09D 5/006 (2013.01); C09D 7/20 (2018.01); C09D 183/14 (2013.01); G03F 7/0752 (2013.01); G03F 7/091 (2013.01); G03F 7/094 (2013.01); C08G 77/80 (2013.01);
Abstract

Compositions for forming thin, silicon-containing antireflective coatings and methods of using these compositions in the manufacture of electronic devices are provided. Silicon-containing antireflective coatings formed from the these compositions can be easily removed during processing without the need for a separate removal step.

Find Patent Forward Citations

Coley, Suzanne. (2020). Silicon-based hardmask (U.S. Patent No. 10818493). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10818493

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…