The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 27, 2020

Filed:

Sep. 21, 2018
Applicant:

Shin-etsu Chemical Co., Ltd., Tokyo, JP;

Inventors:

Hiroyuki Urano, Jyoetsu, JP;

Katsuya Takemura, Jyoetsu, JP;

Masashi Iio, Jyoetsu, JP;

Koji Hasegawa, Jyoetsu, JP;

Kenji Funatsu, Jyoetsu, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/038 (2006.01); C08G 73/10 (2006.01); G03F 7/037 (2006.01); G03F 7/40 (2006.01); C08G 73/12 (2006.01); C08G 77/04 (2006.01); G03F 7/004 (2006.01); G03F 7/075 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); G03F 7/32 (2006.01); G03F 7/38 (2006.01); C07F 7/08 (2006.01); C07F 7/18 (2006.01); C07C 69/76 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0387 (2013.01); C07C 69/76 (2013.01); C07F 7/081 (2013.01); C07F 7/0838 (2013.01); C07F 7/1804 (2013.01); C07F 7/1892 (2013.01); C08G 73/105 (2013.01); C08G 73/106 (2013.01); C08G 73/1046 (2013.01); C08G 73/1053 (2013.01); C08G 73/1071 (2013.01); C08G 73/121 (2013.01); C08G 77/045 (2013.01); G03F 7/0045 (2013.01); G03F 7/037 (2013.01); G03F 7/0757 (2013.01); G03F 7/0758 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/2004 (2013.01); G03F 7/325 (2013.01); G03F 7/38 (2013.01); G03F 7/40 (2013.01);
Abstract

A polymer of a polyimide precursor which includes a structural unit represented by the following general formula (7), where Xrepresents a tetravalent organic group, Xrepresents a divalent organic group, and Rrepresents a group represented by the following general formula (2), where the dotted line represents a bonding, Yrepresents an organic group with a valency of k+1, Rs represents a group containing at least one silicon atom, 'k' represents 1, 2 or 3, and 'n' represents 0 or 1.


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