The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2020
Filed:
Oct. 09, 2018
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Pavel Potocek, Eindhoven, NL;
Faysal Boughorbel, Eindhoven, NL;
Mathijs Petrus Wilhelmus van den Boogaard, Boxtel, NL;
Emine Korkmaz, Veldhoven, NL;
Assignee:
FEI Company, Hillsboro, OR (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/30 (2006.01); H01J 37/20 (2006.01); H01J 37/304 (2006.01); G01N 1/28 (2006.01); H01J 37/244 (2006.01); H01J 37/26 (2006.01); H01J 37/317 (2006.01); H01J 37/305 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3005 (2013.01); G01N 1/286 (2013.01); H01J 37/20 (2013.01); H01J 37/244 (2013.01); H01J 37/26 (2013.01); H01J 37/317 (2013.01); H01J 37/304 (2013.01); H01J 37/3056 (2013.01); H01J 2237/2067 (2013.01); H01J 2237/221 (2013.01); H01J 2237/24495 (2013.01);
Abstract
Producing and storing a first image, of a first, initial surface of the specimen;