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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10804133 B1

PDFFull Text
Date of Patent:
Oct. 13, 2020

Filed:

May. 30, 2018

Article transferring method in semiconductor fabrication

Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Jheng-Si Su, Zhubei, TW;

Yu-Chen Wei, New Taipei, TW;

Chih-Yuan Yang, Hsinchu, TW;

Shih-Ho Lin, Jhubei, TW;

Jen-Chieh Lai, Tainan, TW;

Assignee:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Attorney:

Birch, Stewart, Kolasch & Birch, LLP

Primary Examiner:

Gerald McClain

Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01); B25J 15/06 (2006.01); B65G 61/00 (2006.01); B24B 37/20 (2012.01); H01L 21/67 (2006.01); B25J 11/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6838 (2013.01); B24B 37/20 (2013.01); B25J 11/0095 (2013.01); B25J 15/0616 (2013.01); B65G 61/00 (2013.01); H01L 21/67225 (2013.01); H01L 21/67259 (2013.01); H01L 21/67706 (2013.01); H01L 21/67718 (2013.01); H01L 21/67736 (2013.01); H01L 21/67742 (2013.01); H01L 21/67766 (2013.01); H01L 21/67778 (2013.01); H01L 21/68707 (2013.01); Y10S 901/40 (2013.01);
Abstract

A method for transporting an article used in semiconductor fabrication is provided. The method includes moving a first transporter next to an article to have the article faces a plurality of gas holes formed on the first transporter; suspending the article with the first transporter in a non-contact manner by providing a flow of gas through the gas holes of the first transporter; and transferring the article with the first transporter while the flow of gas is continuously provided.

Find Patent Forward Citations

Su, Jheng-Si. (2020). Article transferring method in semiconductor fabrication (U.S. Patent No. 10804133). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10804133

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