The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 06, 2020

Filed:

May. 17, 2017
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Chien-Hung Wang, Toufen Township, TW;

Chun-Chih Lin, Taipei, TW;

Chi-Hung Liao, Sanchong, TW;

Yung-Yao Lee, Zhubei, TW;

Wei Chang Cheng, Hsinchu, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05C 5/02 (2006.01); B05C 11/08 (2006.01); B05C 11/10 (2006.01); H01L 21/67 (2006.01); F16K 37/00 (2006.01); F16K 31/122 (2006.01); F16K 7/12 (2006.01); F16K 23/00 (2006.01); G03F 7/30 (2006.01); G03F 7/16 (2006.01);
U.S. Cl.
CPC ...
B05C 11/1002 (2013.01); F16K 7/126 (2013.01); F16K 23/00 (2013.01); F16K 31/1221 (2013.01); F16K 37/0041 (2013.01); H01L 21/6715 (2013.01); H01L 21/67017 (2013.01); B05C 5/02 (2013.01); B05C 11/08 (2013.01); G03F 7/162 (2013.01); G03F 7/3021 (2013.01);
Abstract

A drippage prevention system including: a first automatic control valve (ACV), an input of the first ACV fluidically connected to a source of fluid to be dispensed, the first ACV having a position ranging from fully closed to fully open; a second ACV, an input of the second ACV being fluidically connected to the output of the first ACV, and an output of the second ACV being fluidically connected to a nozzle, the second ACV having positions ranging from fully closed to fully open; a proxy sensor configured to generate a proxy signal representing an indirect measure of a position of the first ACV; and a controller electrically connected to the first and second ACVs and the proxy sensor, the controller being configured to cause the second ACV to close based on the proxy signal and thereby stop flow of the liquid to the nozzle.


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