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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10777590 B1

PDFFull Text
Date of Patent:
Sep. 15, 2020

Filed:

Oct. 02, 2019

Method for forming image sensor device structure with doping layer in light-sensing region

Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Yen-Ting Chiang, Tainan, TW;

Chun-Yuan Chen, Tainan, TW;

Hsiao-Hui Tseng, Tainan, TW;

Yu-Jen Wang, Kaohsiung, TW;

Shyh-Fann Ting, Tainan, TW;

Wei-Chuang Wu, Tainan, TW;

Jen-Cheng Liu, Hsinchu, TW;

Dun-Nian Yaung, Taipei, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD, Hsinchu, TW;

Attorney:

McClure, Qualey & Rodack, LLP

Primary Examiner:

Dao H Nguyen

Int. Cl.
CPC ...
H01L 27/146 (2006.01); H01L 31/0352 (2006.01); H01L 31/11 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1461 (2013.01); H01L 27/1463 (2013.01); H01L 27/1464 (2013.01); H01L 27/14638 (2013.01); H01L 27/14685 (2013.01); H01L 31/03529 (2013.01); H01L 31/11 (2013.01); H01L 27/14612 (2013.01); H01L 27/14621 (2013.01); H01L 27/14629 (2013.01);
Abstract

A method for forming an image sensor device structure is provided. The method includes forming a light-sensing region in a substrate, and forming an interconnect structure below a first surface of the substrate. The method also includes forming a trench in the light-sensing region from a second surface of the substrate, and forming a doping layer in the trench. The method includes forming an oxide layer in the trench and on the doping layer to form a doping region, and the doping region is inserted into the light-sensing region.

Find Patent Forward Citations

Chiang, Yen-Ting. (2020). Method for forming image sensor device structure with doping layer in light-sensing region (U.S. Patent No. 10777590). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10777590

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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