The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2020

Filed:

Jun. 25, 2018
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Wan Hsuan Hsu, Taoyuan, TW;

I-Hsiu Wang, Yongkang, TW;

Yean-Zhaw Chen, Tainan, TW;

Cheng-Wei Chang, Hsinchu, TW;

Yu Shih Wang, Tainan, TW;

Hsin-Yan Lu, New Taipei, TW;

Yi-Wei Chiu, Kaohsiung, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8234 (2006.01); H01L 29/417 (2006.01); H01L 21/768 (2006.01); H01L 21/311 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 21/02 (2006.01); H01L 21/027 (2006.01); H01L 27/02 (2006.01); H01L 29/08 (2006.01); H01L 27/088 (2006.01);
U.S. Cl.
CPC ...
H01L 21/823475 (2013.01); H01L 21/0217 (2013.01); H01L 21/0274 (2013.01); H01L 21/02178 (2013.01); H01L 21/31111 (2013.01); H01L 21/31116 (2013.01); H01L 21/31144 (2013.01); H01L 21/76802 (2013.01); H01L 21/76804 (2013.01); H01L 21/76877 (2013.01); H01L 21/76897 (2013.01); H01L 21/823468 (2013.01); H01L 27/0207 (2013.01); H01L 29/0847 (2013.01); H01L 29/41725 (2013.01); H01L 29/41758 (2013.01); H01L 29/41775 (2013.01); H01L 29/41783 (2013.01); H01L 29/41791 (2013.01); H01L 29/665 (2013.01); H01L 29/78 (2013.01); H01L 21/76829 (2013.01); H01L 21/823425 (2013.01); H01L 27/088 (2013.01);
Abstract

An apparatus includes a first source and a common drain and on opposite sides of a first gate surrounded by a first gate spacer, a second source and the common drain on opposite sides of a second gate surrounded by a second gate spacer, a first protection layer formed along a sidewall of the first gate spacer, wherein a top surface of the first protection layer has a first slope, a second protection layer formed along a sidewall of the second gate spacer, wherein a top surface of the second protection layer has a second slope, a lower drain contact between the first gate and the second gate and an upper drain contact over the lower drain contact and between the first gate and the second gate, wherein at least a portion of the upper drain contact is in contact with the first slope and the second slope.


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