The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2020
Filed:
Apr. 30, 2019
Nova Measuring Instruments Ltd., Rehovot, IL;
Boris Levant, Rehovot, IL;
Yanir Hainick, Tel-Aviv, IL;
Vladimir Machavariani, Rishon Lezion, IL;
Roy Koret, Raanana, IL;
Gilad Barak, Rehovot, IL;
NOVA MEASURING INSTRUMENTS LTD., Rehovot, IL;
Abstract
Determining parameters of a patterned structure located on top of an underneath layered structure, where input data is provided which includes first measured data PMD being a function ƒ of spectral intensity Iand phase ϕ, PMD=ƒ(I; ϕ), corresponding to a complex spectral response of the underneath layered structure, and second measured data Sindicative of specular reflection spectral response of a sample formed by the patterned structure and the underneath layered structure, and where a general function F is also provided describing a relation between a theoretical optical response Sof the sample and a modeled optical response Sof the patterned structure and the complex spectral response PMD of the underneath layered structure, such that S=F(S; PMD), where the general function is then utilized for comparing the second measured data Sand the theoretical optical response S, and determining parameter(s) of interest of the top structure.