The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2020
Filed:
Nov. 15, 2017
Nuflare Technology, Inc., Yokohama-shi, Kanagawa, JP;
Kunihiko Suzuki, Shizuoka, JP;
Naohisa Ikeya, Kanagawa, JP;
Masayoshi Yajima, Kanagawa, JP;
Kazukuni Hara, Aichi, JP;
Hiroaki Fujibayashi, Aichi, JP;
Hideki Matsuura, Aichi, JP;
Katsumi Suzuki, Aichi, JP;
NuFlare Technology, Inc., Yokohama-shi, Kanagawa, JP;
Abstract
A film forming apparatus according to an embodiment includes: a film forming chamber configured to house therein a substrate to perform film forming processing; a gas supplier located in an upper part of the film forming chamber and configured to supply a process gas onto the substrate; and a heater configured to heat the substrate, wherein the film forming chamber has a temperature-increase suppression region being a lower part of the gas supplier and suppressing a temperature increase of the gas supplied to an upper part of the heater.