The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2020
Filed:
Nov. 15, 2016
Tokyo Electron Limited, Minato-ku, Tokyo, JP;
Mihail Mihaylov, San Jose, CA (US);
Xinkang Tian, Fremont, CA (US);
Ching-Ling Meng, Sunnyvale, CA (US);
Jason Ferns, Sunnyvale, CA (US);
Joel Ng, San Leandro, CA (US);
Badru D. Hyatt, Fremont, CA (US);
Zheng Yan, San Jose, CA (US);
Vi Vuong, Fremont, CA (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
An advanced optical sensor and method for detection of optical events in a plasma processing system. The method includes detecting at least one light emission signal in a plasma processing chamber. The at least one detected light emission signal including light emissions from an optical event. The method further includes processing the at least one light emission signal and detecting a signature of the optical event from the processed light emission signal.