The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2020
Filed:
Sep. 26, 2016
Asml Netherlands B.v., Veldhoven, NL;
Peter Ten Berge, Eindhoven, NL;
Everhardus Cornelis Mos, Best, NL;
Richard Johannes Franciscus Van Haren, Waalre, NL;
Peter Hanzen Wardenier, Eindhoven, NL;
Erik Jensen, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method including modeling high resolution patterning error information of a patterning process involving a patterning device in a patterning system using an error mathematical model, modeling a correction of the patterning error that can be made by a patterning device modification tool using a correction mathematical model, the correction mathematical model having substantially the same resolution as the error mathematical model, and determining modification information for modifying the patterning device using the patterning device modification tool by applying the correction mathematical model to the patterning error information modeled by the error mathematical model.