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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10665585 B1

PDFFull Text
Date of Patent:
May. 26, 2020

Filed:

Apr. 06, 2015

Structure and method for alignment marks

Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventors:

Ming-Chang Wen, Kaohsiung, TW;

Chun-Kuang Chen, Guanxi Township, Hsinchu County, TW;

Hsien-Cheng Wang, Hsinchu, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsin-Chu, TW;

Attorney:

Haynes and Boone, LLP

Primary Examiner:

Caridad Everhart

Assistant Examiner:

Ankush K Singal

Int. Cl.
CPC ...
H01L 27/088 (2006.01); H01L 21/8234 (2006.01); H01L 29/66 (2006.01); H01L 29/49 (2006.01); H01L 29/51 (2006.01);
U.S. Cl.
CPC ...
H01L 27/088 (2013.01); H01L 21/823418 (2013.01); H01L 21/823456 (2013.01); H01L 21/823493 (2013.01); H01L 29/4916 (2013.01); H01L 29/51 (2013.01); H01L 29/66545 (2013.01); H01L 29/66575 (2013.01); H01L 29/6659 (2013.01);
Abstract

The alignment mark and method for making the same are described. In one embodiment, a semiconductor structure includes a plurality of gate stacks formed on the semiconductor substrate and configured as an alignment mark; doped features formed in the semiconductor substrate and disposed on sides of each of the plurality of gate stacks; and channel regions underlying the plurality of gate stacks and free of channel dopant.

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Wen, Ming-Chang. (2020). Structure and method for alignment marks (U.S. Patent No. 10665585). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10665585

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