The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2020
Filed:
Jul. 27, 2017
Uchicago Argonne, Llc, Chicago, IL (US);
Deming Shu, Darien, IL (US);
Barry Lai, Woodridge, IL (US);
Steven P. Kearney, Lombard, IL (US);
Jayson W. Anton, Chicago, IL (US);
Wenjun Liu, Bolingbrook, IL (US);
Jorg M. Maser, Oak Park, IL (US);
Christian Roehrig, Plainfield, IL (US);
Jonathan Z. Tischler, Lisle, IL (US);
UChicago Argonne, LLC, Chicago, IL (US);
Abstract
An enhanced method and precision nanopositioning apparatus for implementing enhanced nanopositioning performance is provided. The nanopositioning apparatus includes a vertical linear nanopositioning flexure stage and a horizontal linear nanopositioning flexure stage. The vertical linear nanopositioning flexure stage includes a stage base, a symmetrically configured flexure linear guiding mechanism with precision motion enhancement structure, and a stage carriage. The horizontal linear nanopositioning flexure stage is mounted on the stage carriage of the vertical linear nanopositioning flexure stage, and includes a middle-bar relative position control mechanism to enhance the stiffness of a flexure linear guiding mechanism.