The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2020
Filed:
Jan. 02, 2017
Kla-tencor Corporation, Milpitas, CA (US);
Jing Zhang, Santa Clara, CA (US);
Grace Hsiu-Ling Chen, Los Gatos, CA (US);
Kris Bhaskar, San Jose, CA (US);
Keith Wells, Santa Cruz, CA (US);
Nan Bai, Fremont, CA (US);
Ping Gu, San Jose, CA (US);
Lisheng Gao, Saratoga, CA (US);
KLA-Tencor Corp., Milpitas, CA (US);
Abstract
Methods and systems for generating a high resolution image for a specimen from one or more low resolution images of the specimen are provided. One system includes one or more computer subsystems configured for acquiring one or more low resolution images of a specimen. The system also includes one or more components executed by the one or more computer subsystems. The one or more components include a model that includes one or more first layers configured for generating a representation of the one or more low resolution images. The model also includes one or more second layers configured for generating a high resolution image of the specimen from the representation of the one or more low resolution images.