The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 05, 2020

Filed:

Aug. 28, 2017
Applicant:

Tohoku University, Sendai-shi, Miyagi, JP;

Inventors:

Kenchi Ito, Miyagi, JP;

Tetsuo Endoh, Miyagi, JP;

Shoji Ikeda, Miyagi, JP;

Hideo Sato, Miyagi, JP;

Hideo Ohno, Miyagi, JP;

Sadahiko Miura, Miyagi, JP;

Masaaki Niwa, Miyagi, JP;

Hiroaki Honjo, Miyagi, JP;

Assignee:

TOHOKU UNIVERSITY, Sendai-shi, Miyagi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 43/12 (2006.01); H01L 21/8239 (2006.01); H01L 27/22 (2006.01);
U.S. Cl.
CPC ...
H01L 43/12 (2013.01); H01L 21/8239 (2013.01); H01L 27/228 (2013.01);
Abstract

A method for producing a magnetic memory includes: forming a magnetic film having a non-magnetic layer between a first magnetic layer and a second magnetic layer on a substrate having an electrode layer; performing annealing treatment at a first treatment temperature in a state where a magnetic field is applied in a direction perpendicular to a film surface of the first or the second magnetic layer in vacuum; forming a magnetic tunnel junction element; forming a protective film protecting the magnetic tunnel junction element; a formation accompanied by thermal history, in which a constituent element of a magnetic memory is formed after the protective film formation on the substrate; and implementing annealing treatment at a second treatment temperature lower than the first treatment temperature on the substrate in an annealing treatment chamber, in vacuum or inert gas wherein no magnetic field is applied.


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