The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2020
Filed:
Nov. 30, 2016
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Seyed Iman Mossavat, Waalre, NL;
Remco Dirks, Deurne, NL;
Hugo Augustinus Joseph Cramer, Eindhoven, NL;
Assignee:
ASML Netherlands B. V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/02 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G01B 11/02 (2013.01); G03F 7/705 (2013.01); G03F 7/70625 (2013.01);
Abstract
A method including obtaining measurement results of a device manufacturing process or a product thereof, obtaining sets of one or more values of one or more parameters of a distribution by fitting the distribution against the measurement results, respectively, and obtaining, using a computer, a set of one or more values of one or more hyperparameters of a hyperdistribution by fitting the hyperdistribution against the sets of values of the parameters.