The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2020
Filed:
Jul. 26, 2018
Kla-tencor Corporation, Milpitas, CA (US);
Vidyasagar Anantha, Fremont, CA (US);
Manikandan Mariyappan, Portland, OR (US);
Raghav Babulnath, San Jose, CA (US);
Gangadharan Sivaraman, Chennai, IN;
Satya Kurada, Fremont, CA (US);
Thirupurasundari Jayaraman, Chennai, IN;
Prasanti Uppaluri, Saratoga, CA (US);
Srikanth Kandukuri, Hyderabad, IN;
KLA-Tencor Corp., Milpitas, CA (US);
Abstract
Methods and systems for creating a sample of defects for a specimen are provided. One method includes detecting defects on a specimen based on output generated by a detector of an output acquisition subsystem. For the defects detected in an array region on the specimen, where the array region includes multiple array cell types, the method includes stacking information for the defects based on the multiple array cell types. The stacking includes overlaying design information for only a first of the multiple array cell types with the information for only the defects detected in the first of the multiple array cell types. In addition, the method includes selecting a portion of the detected defects based on results of the stacking thereby creating a sample of the detected defects.