The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2020

Filed:

Feb. 26, 2018
Applicant:

Shanghai Simgui Technology Co., Ltd., Shanghai, CN;

Inventors:

Xing Wei, Shanghai, CN;

Meng Chen, Shanghai, CN;

Yongwei Chang, Shanghai, CN;

Guoxing Chen, Shanghai, CN;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/08 (2006.01); H01L 21/02 (2006.01); H01L 21/762 (2006.01); C11D 11/00 (2006.01); C11D 7/06 (2006.01); H01L 21/20 (2006.01); B08B 3/10 (2006.01); H01L 29/161 (2006.01); H01L 29/16 (2006.01); H01L 29/20 (2006.01);
U.S. Cl.
CPC ...
B08B 3/08 (2013.01); C11D 7/06 (2013.01); C11D 11/0047 (2013.01); H01L 21/02052 (2013.01); H01L 21/2007 (2013.01); H01L 21/76251 (2013.01); B08B 3/10 (2013.01); B08B 2203/007 (2013.01); H01L 29/16 (2013.01); H01L 29/161 (2013.01); H01L 29/1608 (2013.01); H01L 29/20 (2013.01); H01L 29/2003 (2013.01);
Abstract

The present disclosure provides a method for cleaning a bonding interface before bonding. The method includes: providing a first surface and a second surface for bonding, the first surface being a non-crystal surface and the second surface being a crystal surface; and cleaning the first surface and the second surface with ammonia respectively before bonding, wherein at least one of parameters of an ammonia concentration and a cleaning temperature for cleaning the first surface is higher than a counterpart of parameters for cleaning the second surface.


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