The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 24, 2020

Filed:

Mar. 12, 2018
Applicant:

Nxp Usa, Inc., Austin, TX (US);

Inventors:

Bernhard Grote, Phoenix, AZ (US);

Saumitra Raj Mehrotra, Scottsdale, AZ (US);

Ljubo Radic, Gilbert, AZ (US);

Vishnu Khemka, Chandler, AZ (US);

Assignee:

NXP USA, INC., Austin, TX (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/40 (2006.01); H01L 29/423 (2006.01); H01L 29/66 (2006.01); H01L 27/088 (2006.01); H01L 29/78 (2006.01); H01L 21/8234 (2006.01);
U.S. Cl.
CPC ...
H01L 29/4236 (2013.01); H01L 27/088 (2013.01); H01L 29/404 (2013.01); H01L 29/407 (2013.01); H01L 29/66666 (2013.01); H01L 29/7803 (2013.01); H01L 29/7813 (2013.01); H01L 29/7827 (2013.01); H01L 21/823487 (2013.01);
Abstract

A trench structure is located directly laterally between a first well and a first source region for a first transistor and the second well region with a second source for a second transistor. The trench structure includes a first gate structure for the first transistor, a second gate structure for the second transistor, a first conductive field plate structure, and a second conductive field plate structure. The first gate structure, the first field plate structure, the second field plate structure, and the second gate structure are located in the trench structure in a lateral line between the first well region and the second well region. The trench structure includes a dielectric separating the first field plate structure and the second field plate structure from each other in the lateral line. A drain region for the first transistor and the second transistor includes a portion located directly below the trench structure.


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