The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 24, 2020

Filed:

Aug. 24, 2017
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventors:

Aastha Uppal, Chandler, AZ (US);

Je-Young Chang, Phoenix, AZ (US);

Shankar Devasenathipathy, Tempe, AZ (US);

Joseph B. Petrini, Gilbert, AZ (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); G01K 7/22 (2006.01); H01L 23/498 (2006.01); G01K 1/02 (2006.01); G01K 1/14 (2006.01); H01L 23/427 (2006.01);
U.S. Cl.
CPC ...
H01L 22/34 (2013.01); G01K 1/026 (2013.01); G01K 1/14 (2013.01); G01K 7/226 (2013.01); H01L 22/12 (2013.01); H01L 23/49816 (2013.01); H01L 23/427 (2013.01);
Abstract

Embodiments of the present disclosure provide techniques and configurations for inspection of a package assembly with a thermal solution, in accordance with some embodiments. In embodiments, an apparatus for inspection of a package assembly with a thermal solution may include a first fixture to house the package assembly on the apparatus, and a second fixture to house at least a portion of a thermal solution that is to be disposed on top of the package assembly. The apparatus may further include a load actuator, to apply a load to a die of the package assembly, via the thermal solution, and a plurality of sensors disposed around the thermal solution and the package assembly, to perform in situ thermal and/or mechanical measurements associated with the application of the load to the die of the package assembly. Other embodiments may be described and/or claimed.


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