The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 28, 2020

Filed:

Feb. 25, 2014
Applicants:

Stmicroelectronics, Inc., Coppell, TX (US);

Globalfoundries Inc., Grand Cayman, KY;

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Qing Liu, Watervliet, NY (US);

Xiuyu Cai, Niskayuna, NY (US);

Chun-chen Yeh, Clifton Park, NY (US);

Ruilong Xie, Schenectady, NY (US);

Assignees:

STMICROELECTRONICS, INC., Coppell, TX (US);

GLOBALFOUNDRIES INC., Grand Cayman, KY;

INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/092 (2006.01); H01L 21/8238 (2006.01); H01L 21/285 (2006.01); H01L 21/768 (2006.01); H01L 23/485 (2006.01); H01L 29/45 (2006.01);
U.S. Cl.
CPC ...
H01L 27/092 (2013.01); H01L 21/28518 (2013.01); H01L 21/76897 (2013.01); H01L 21/823814 (2013.01); H01L 21/823871 (2013.01); H01L 21/823892 (2013.01); H01L 23/485 (2013.01); H01L 29/456 (2013.01);
Abstract

A method for fabricating a CMOS integrated circuit structure and the CMOS integrated circuit structure. The method includes creating one or more n-type wells, creating one or more p-type wells, creating one or more pFET source-drains embedded in each of the one or more n-type wells, creating one or more nFET source-drains embedded in each of the one or more p-type wells, creating a pFET contact overlaying each of the one or more pFET source-drains, and creating an nFET contact overlaying each of the one or more nFET source-drains. A material of each of the one or more pFET source-drains includes silicon doped with a p-type material; a material of each of the one or more nFET source-drains includes silicon doped with an n-type material; a material of each pFET contact includes nickel silicide; and a material of each nFET contact comprises titanium silicide.


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