The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2020
Filed:
Dec. 29, 2017
Applicant:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Inventors:
Assignee:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/125 (2006.01); H02N 1/00 (2006.01); B81B 3/00 (2006.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
H02N 1/006 (2013.01); B81B 3/001 (2013.01); B81B 3/0005 (2013.01); B81B 3/0008 (2013.01); G01P 15/125 (2013.01); H02N 1/00 (2013.01); B81B 2201/0235 (2013.01); G01P 2015/0871 (2013.01); Y10T 29/49002 (2015.01);
Abstract
A microelectromechanical system (MEMS) device includes a substrate and a movable element at least partially suspended above the substrate and having at least one degree of freedom. The MEMS device further includes a protrusion extending from the substrate and configured to contact the movable element when the movable element moves in the at least one degree of freedom, wherein the protrusion comprises a surface having a water contact angle of higher than about 15° measured in air.