The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 21, 2020

Filed:

Jul. 26, 2017
Applicant:

Battelle Memorial Institute, Richland, WA (US);

Inventors:

Bryan A. Stanfill, Richland, WA (US);

Sarah M. Reehl, Richland, WA (US);

Margaret C. Johnson, Cary, NC (US);

Lisa M. Bramer, Kennewick, WA (US);

Nigel D. Browning, Richland, WA (US);

Andrew J. Stevens, Richland, WA (US);

Libor Kovarik, West Richland, WA (US);

Assignee:

BATTELLE MEMORIAL INSTITUTE, Richland, WA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); H01J 37/06 (2006.01); H01J 37/244 (2006.01);
U.S. Cl.
CPC ...
H01J 37/265 (2013.01); H01J 37/06 (2013.01); H01J 37/244 (2013.01);
Abstract

Disclosed are methods for sensing conditions of an electron microscope system and/or a specimen analyzed thereby. Also disclosed are sensor systems and electron microscope systems able to sense system conditions, and/or conditions of the specimen being analyzed by such systems. In one embodiment, a sparse dataset can be acquired from a random sub-sampling of the specimen by an electron beam probe of the electron microscope system. Instrument parameters, specimen characteristics, or both can be estimated from the sparse dataset.


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