The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 21, 2020

Filed:

Nov. 30, 2018
Applicant:

Bruker Nano Gmbh, Berlin, DE;

Inventors:

Detlef Knebel, Berlin, DE;

Torsten Jähnke, Berlin, DE;

Jonas Hiller, Berlin, DE;

Assignee:

Bruker Nano GmbH, Berlin, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01Q 60/38 (2010.01); G01Q 20/02 (2010.01); G01Q 60/22 (2010.01); G01Q 60/30 (2010.01); G01Q 70/16 (2010.01);
U.S. Cl.
CPC ...
G01Q 60/38 (2013.01); G01Q 20/02 (2013.01); G01Q 60/22 (2013.01); G01Q 60/30 (2013.01); G01Q 70/16 (2013.01);
Abstract

The invention relates to a measuring device for a scanning probe microscope including a measuring probe a first probe holding device on which the measuring probe is arranged, a detection device including a measurement light source which is adapted to provide light beams directed toward the measuring probe, a sensor device which is adapted, during the operation to receive measurement light beams reflected from the measuring probe. A first measuring arrangement in which the first probe holding device with the measuring probe is arranged in a first position spaced from the detection device, and a second measuring arrangement is formed in which a lengthening device is changeably arranged between the detection device and the measuring probe which lengthens the respective optical beam path for the light beams and the measurement light beams in such a manner that the first probe holding device or a second probe holding device which is different from the first probe holding device is arranged with the measuring probe at a second position spacing from the detection device which is greater than the first position spacing.


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