The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 14, 2020

Filed:

Dec. 17, 2018
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Chen-Hua Yu, Hsinchu, TW;

Ming-Fa Chen, Taichung, TW;

Wen-Ching Tsai, Hsinchu, TW;

Sung-Feng Yeh, Taipei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 25/065 (2006.01); H01L 23/538 (2006.01); H01L 23/00 (2006.01); H01L 21/768 (2006.01); H01L 23/48 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
H01L 25/065 (2013.01); H01L 21/76898 (2013.01); H01L 23/48 (2013.01); H01L 23/481 (2013.01); H01L 23/5384 (2013.01); H01L 24/03 (2013.01); H01L 24/06 (2013.01); H01L 24/08 (2013.01); H01L 24/19 (2013.01); H01L 24/24 (2013.01); H01L 24/92 (2013.01); H01L 21/31111 (2013.01); H01L 21/31116 (2013.01); H01L 21/76805 (2013.01); H01L 24/80 (2013.01); H01L 24/82 (2013.01); H01L 2224/0212 (2013.01); H01L 2224/0231 (2013.01); H01L 2224/0237 (2013.01); H01L 2224/0401 (2013.01); H01L 2224/04105 (2013.01); H01L 2224/05567 (2013.01); H01L 2224/05647 (2013.01); H01L 2224/08145 (2013.01); H01L 2224/09181 (2013.01); H01L 2224/11 (2013.01); H01L 2224/12105 (2013.01); H01L 2224/131 (2013.01); H01L 2224/13022 (2013.01); H01L 2224/18 (2013.01); H01L 2224/24146 (2013.01); H01L 2224/73267 (2013.01); H01L 2224/80896 (2013.01); H01L 2224/821 (2013.01); H01L 2224/82031 (2013.01); H01L 2224/9202 (2013.01); H01L 2224/9212 (2013.01); H01L 2224/92244 (2013.01); H01L 2224/94 (2013.01); H01L 2924/18162 (2013.01);
Abstract

Disclosed herein is a package comprising a first redistribution layer (RDL) disposed on a first side of a first semiconductor substrate and a second RDL disposed on a second semiconductor substrate, wherein the first RDL is bonded to the second RDL. First conductive elements are disposed in the first RDL and the second RDL. First vias extend from one or more of the first conductive elements through the first semiconductor substrate to a second side of the first semiconductor substrate opposite the first side. First spacers are interposed between the first semiconductor substrate and the first vias and each extend from a respective one of the first conductive elements through the first semiconductor substrate.


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